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International Journal of Scientific and Engineering Research
ISSN Online 2229-5518
ISSN Print: 2229-5518 6    
Website: http://www.ijser.org
scirp IJSER >> Volume 3,Issue 6,June 2012
Design and Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications
Full Text(PDF, )  PP.74-81  
Author(s)
Avigyan Datta Gupta,Chirashree Roy Chaudhuri
KEYWORDS
MEMS,microheater,FEM, micromachining,SOI wafer, heat loss, temperature, stress, minimum power loss.
ABSTRACT
In this paper a design and analysis of an array of I00nm thin film MEMS based microheater on SOI wafer is presented. The microheater is constructed on a SOI wafer where temperature rise of 2000C is achieved with minimum power consumption of 20mW.Also there is minimum heat loss through the substrate. The temperature rise is concentrated in only the microheater region and there is excellent uniformity in the temperature distribution in both the microheaters.Stress and displacement analysis is also carried out for the structure and the result is satisfactory. 
References
[1] Isolde Simon, Nicole Barsan, Michael Bauer, U. Weimer, “Micromachined metal oxide sensors: opportunities to improve sensor performance”, Sensors and Actuators, B73, ELSEVIER, 9-12.

[2] P.Hille, H.Strack,”A heated membrane for a capacitive gas sensor”, Sensors and Actuators,A32 (1992) 321-325.

[3] U.Grigull, H.Sandner, Warmeleitung, Springer, Berlin, 1979

[4] S. Astie, A. Gue, E. Schield, L. Lescouzeres. A. Cassagnes. “Optimization of an integrated SnO2 gas sensor using FEM simulator,” Sens. Actuators, A69 (1998) 205-211.

[5] G.G.MandayoE. Castano, “Carbon monoxide detector fabricated on the basis of a Tin oxide novel doping method”, IEEE Sensors Journal Vol 2 No 4 Aug 2002, 326.

[6] G. Sberveglieri, W. Hellmich, G. Muller, Silicon hotplates for metal oxide gas sensor elements, Microsyst. Technol. 3 (1997) 183-190.

[7] Han Ji-song,T. Kadowaki, K. Sato,M. Shikida, Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors,Sensors and Actuators A 100 (2002) 114–122.

[8] T. Guano, R. Puers,Thermal Analysis of a Ag/Ti Based Microheater,Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria.

*9+ J.P. Colinge, “Silicon-On-Insulator Technology: Materials to VLSI, Second Edition”, Kluwer Academic Publishers, 1997, Chapter 2, pgs. 32-44.

[10] www.coventorware.com

[11]http://www.sv.vt.edu/classes/MSE2094_NoteBook/97Cl assProj/num/widas/history.html

[12]http://www.mit.edu/~6.777/matprops/sio2.html

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