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International Journal of Scientific and Engineering Research
ISSN Online 2229-5518
ISSN Print: 2229-5518 6    
Website: http://www.ijser.org
scirp IJSER >> Volume 3,Issue 6,June 2012
Design and Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications
Full Text(PDF, )  PP.74-81  
Avigyan Datta Gupta,Chirashree Roy Chaudhuri
MEMS,microheater,FEM, micromachining,SOI wafer, heat loss, temperature, stress, minimum power loss.
In this paper a design and analysis of an array of I00nm thin film MEMS based microheater on SOI wafer is presented. The microheater is constructed on a SOI wafer where temperature rise of 2000C is achieved with minimum power consumption of 20mW.Also there is minimum heat loss through the substrate. The temperature rise is concentrated in only the microheater region and there is excellent uniformity in the temperature distribution in both the microheaters.Stress and displacement analysis is also carried out for the structure and the result is satisfactory. 
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