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International Journal of Scientific and Engineering Research
ISSN Online 2229-5518
ISSN Print: 2229-5518 11    
Website: http://www.ijser.org
scirp IJSER >> Volume 3,Issue 11,November 2012
Micro-electromechanical System (Mems) Sensor
Full Text(PDF, )  PP.158-165  
Author(s)
Azharuddin Allamin Shaikh, Dattatraya Shashikant Shitole 
KEYWORDS
Automotive Sensor, Bulk micromachining, Biological Sensor, Chemical sensor, Electro Mechanical, High aspect ratio (HAR) silicon micromachining, Micro Sensor, sensor, surface micromachining
ABSTRACT
There are many new emerging technologies in electronics and telecommunication but this paper focuses particularly about "MICRO-ELECTROMECHANICAL SYSTEM (MEMS) SENSOR Purpose - To describe the development of micro-electromechanical system (MEMS) sensor tec
References
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