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International Journal of Scientific and Engineering Research
ISSN Online 2229-5518
ISSN Print: 2229-5518 10    
Website: http://www.ijser.org
scirp IJSER >> Volume 3,Issue 10,October 2012
Spin Coated YSZ Thin Films on Silicon Substrate
Full Text(PDF, )  PP.1-5  
Author(s)
Shirley Tiong Palisoc, Rose Ann Tegio, Michelle Natividad, Simon Gerard Mendiola, Benjamin Tuason, Kevin Kaw and Stephen Tadios
KEYWORDS
Yttria Stabilized Zirconia,YSZ, spin-coating, thin film
ABSTRACT
Yttria Stabilized Zirconia (YSZ) thin films (<10 µm) were fabricated by spin coating technique on silicon (Si). Parameters such as concentration ratio of YSZ powder to solvent were varied accordingly. The effects of these variations were investigated and
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