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International Journal of Scientific and Engineering Research
ISSN Online 2229-5518
ISSN Print: 2229-5518 4    
Website: http://www.ijser.org
scirp IJSER >> Volume 3,Issue 4,April 2012
Design and Implementation of Piezoelectric Pressure Sensor
Full Text(PDF, )  PP.255-259  
Author(s)
Amira Mahmoud Olayan, Amal Zaki, Hazem Hassan
KEYWORDS
— COMSOL modeling and simulation, MEMS, Piezoelectric microphone, square diaphragm, ZnO.
ABSTRACT
This paper offers an analytical modeling of thin-filmed, multi-layer piezoelectric sensor. In this work, analysis and simulation of a thin plate pressure sensor is carried on using both mathematical models and finite element analyses. Experimental methods, in the form of full-field-of-view laser microscopy, are applied to show the internal structure of the fabricated pressure sensor and update the computational models. The combined approach of the two methods is used to determine the elastic modulus and the thickness of the diaphragm of the pressure sensor.
References
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[3] Hsu T.R., MEMS & Microsystems: design and manufacture, McGraw-Hill, New York, 2002

[4] Pelesko, J. A. and Bernstein, D. A., Modeling MEMS and NEMS, CRC Press, Boca Raton FL, 2003

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[6] Lawrence K. L., ANSYS Workbench Tutorial, Schroff Development Corp, 2005

[7] Kuppers, J. D., Gouverneur, I. M., Rodgers, M. T., Wenger, J. and Furlong, C., “Dynamic characterization of AFM probes by laser Doppler vibrometry and stroboscopic holographic methodologies,” Proc. SPIE, San Diego CA, 2006

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