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International Journal of Scientific and Engineering Research
ISSN Online 2229-5518
ISSN Print: 2229-5518 10    
Website: http://www.ijser.org
scirp IJSER >> Volume 2, Issue 10, October 2011 Edition
Optimization of Capacitive MEMS Pressure Sensor for RF Telemetry
Full Text(PDF, 3000)  PP.  
Author(s)
Prince Nagpal, Manish Mehta, Kamaljeet Rangra, Ravinder Aggarwal
KEYWORDS
MEMS, Capacitive, Diaphragm, Biocompatible, Biomedical
ABSTRACT
This paper describes the capacitive pressure sensor design for biomedical applications like blood pressure measurement. The described pressure sensors provide high sensitivity even at low pressure range suitable for biomedical applications. Effects of varying different parameters on the pressure sensor performance have been studied. From the results, the pressure sensors with compatible parameters can be selected for specific requirements. These compact pressure sensors are made up of biocompatible materials and can be implanted easily inside body to be used for RF telemetry purpose
References
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[2] Darrin J. Young, “An RF-Powered Wireless Multi-Channel Implantable Bio-Sensing Microsystem,” In 32nd Annual International Conference of the IEEE EMBS Buenos Aires, pp. 6413-6416, Aug.31-Sep.4, 2010.

[3] C.C. Wang, B. P. Gogoi, D. J. Monk and C. H. Mastrangelo, “Contamination Insensitive Differential Capacitive Pressure Sensor”, IEEE, pp. 551-555, 2000.

[4] Jeahyeong Han and Mark A. Shannon, “Smooth Contact Capacitive Pressure Sensors in Touch- and Peeling-Mode Operation,” IEEE SENSORS JOURNAL, Vol. 9, No. 3, pp. 199-206, March 2009.

[5] Jeahyeong Han, Junghoon Yeom, Junghyun Lee, and Mark A. Shannon, “Smooth Contact Mode Capacitive Pressure Sensor with Polyimide Diaphragm”, Conference IEEE SENSORS, pp. 1468-1471, 2007.

[6] Norhayati Soin and Burhanuddin Yeop Majlis, “An Analytic Study on Diaphragm Behavior for Micromachined Capacitive Pressure Sensor”, in Proc. ICSE2002, pp. 502–505, 2002.

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