Effect of Laser Irradiation on structure, Morphology and gas Sensor Properties of Chemical Spray Pyrolysis Deposited Nanostructured In2O3 Films [ ]


In this study, Indium oxide nanocrystalline In2O3 films have been successfully deposited on glass substrates by Chemical Spray Pyrolysis (CSP) technique at substrate temperature of (300ОC) It was irradiated by pulses N2 laser at different power average (0.85, 1.70, 2.125 and 2.55mW). The structural and sensitivity properties of these films have been investigated using XRD, AFM and the sensitivity to NO2 gas in air ambient has been measured in gas sensing system. The XRD results showed that all films are polycrystalline in nature with cubic structure and preferred orientation along (321) plane. The crystallite size was calculated using scherrer formula. The crystallite size of the samples was maximum (17.5nm) before irradiation, and it was minimum (8.04nm) at power average (2.55mw), prepared at the same films. AFM results showed homogenous and smooth Indium oxide thin films. The average grain size, average roughness and root mean square (RMS) roughness for nanocrystalline In2O3 films were estimated from AFM. The sensitivity of nanocrystalline In2O3 films to NO2 gas in air ambient has been measured in gas sensing system. All samples were tested at different power average, and bias voltage (6 volt). The optimal operating temperature is found to be 300oC for In2O3 films for the maximum sensitivity is (64.12%) at power average (1.70mw), with fast response time (5.85s) and recovery time of (9.0s) at power average (0.85mw).